S.C. Jacobsen (PI) and J.E. Wood (Co-PI) introduced the term "MEMS" by way of a proposal to DARPA (15 July 1986), titled "Micro Electro-Mechanical Systems (MEMS)", granted to the University of Utah.

MEMS technology is extremely diverse and fertile, both in its expected application areas, as well as in how the devices are designed and manufactured. Already, MEMS is revolutionizing many product …

This page provides a detailed explanation of MEMS, which use semiconductor processing technology commonly found in everyday products.

Dec 22, 2025 · In a microelectromechanical system (MEMS), microscale mechanical parts and electronic circuits are combined to form miniature devices and structures, typically on a …

Jun 10, 2025 · MEMS stands for Micro-Electro-Mechanical Systems. It represents the integration of tiny mechanical structures with microelectronics using semiconductor fabrication techniques. MEMS …

Jul 1, 2025 · MEMS is an umbrella term for a wide range of microfabrication designs, methods and mechanisms that involve realising moving mechanical parts at the microscopic scale.

Although MEMS is also referred to as MST, strictly speaking, MEMS is a process technology used to create these tiny mechanical devices or systems, and as a result, it is a subset of MST.

MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip.

This article is an overview of MEMs devices, the categories they fall into, and factors to consider when designing them. It explains the common uses for MEMs across various industries.

Typically ranging from a few millimeters to less than one micron, MEMS can include sensors, actuators, and more, designed to observe environmental conditions and react accordingly.